The-state-of-the-art Hysitron Triboindenter in our nanomechanical testing laboratory enables us to carry out research on characterization of thin film properties, MEMS sensor performance and deformation mechanisms of brittle materials, by means of nanoindentation and nanoscratch. For more information visit the Triboindenter website
The MSA-400 Micro System Analyzer is a powerful new all-in-one measurement workstation for precise 3-D dynamic characterization of MEMS and MOEMS microstructures. It can characterize out-of-plane vibrations by scanning Laser-Doppler Vibrometry, measure in-plane motion and vibration by stroboscopic video microscopy, determine surface topography by white light interferometry, and test wafers and individual die by combining Polytec’s MSA-400 with a MEMS probe station. For more information visit the Polytec website
The DektakXT stylus profiler is a research-grade surface metrology characterisation tool. Surface profilometry is recognised as the standard method for surface measurement in semiconductor manufacturing and is typically used to evaluate surface roughness, waviness, step height, thin film thickness, and the residual stress of fabricated wafers. The Dektak XT is able to deliver surface profiles with a step-height repeatability of 5 Å. The facility allows for a maximum scan length of 55mm, extending to 200mm with data stitching, and 3D mapping capabilities allow for effective surface visualisation. With a 1mm vertical range, the Dektak XT is also capable of characterising machined components from a variety of industries, including medical, automotive, aerospace.

The LEXT OLS 4000 system is a confocal microscope capable of taking high resolution (nanometre-scale) 3D images and performing a variety of metrology measurements. This system features wide magnification range (from 108x to 17,280x ), ultra-high resolution (10 nm in z direction and 120 nm in x-y plane) and robust measurement performance. For more information visit the Olympus website.

The Sinterstation 2500+ SLS system uses a 100 w carbon dioxide laser to fuse particles of polymers, metals and ceramics in order to construct complex solid three-dimensional part layer-by-layer. The SLS system produces complex plastic prototypes and end-use parts directly from 3D CAD data files, eliminating the need for machining, tooling and other post-processes. For more information visit the 3Dsystem website.


The SLM system is a unique test apparatus that was developed for laser melting of metal and ceramic powders. This system adapts a 2 kW fibre-coupling diode laser (Laserline) into a safety enclosure, in which a motorized x-y-z stage allows 3D movement to simulate an additive manufacturing process.
Ultra-precise high-speed grinding allows for the efficient material-removal of a new class of emerging materials previously considered too brittle to machine. These include advanced ceramics, composites, and thin-film multilayers. The first installation of its kind in Australia; the UPZ315Li provides 0.1 µm precision numerical control in X, Y and Z axes whilst outputting a maximum spindle speed of 20,000 RPM. A 100 meter/min table speed allows for greater material removal rates, made possible through an advanced lubrication system. Comprehensive grinding force analysis is facilitated by a Kistler 9257B Dynamometer, providing a high-resolution measurement of force applied to the work piece in X, Y and Z axes. For more information visit the Olympus website.

CMM is an interdisciplinary research, teaching and service centre at The University of Queensland. Students will access to all the facilities at the Centre through our membership program. This may involve a single basic training module or a set of modules covering a range of skills. You can operate equipment and interpret results for yourself while drawing on the expertise of staff. CMM provides training and education in a range of techniques in high-end science technology, ranging from imaging and quantifying morphology to analysing surfaces and characterizing components and materials. For more information visit the CMM website.